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1

(Invited) Selective Atomic Layer Deposition of Cobalt for Back End of Line

Elko-Hansen, Tyler D.-M., Ekerdt, John Gilbert

Journal:

ECS Transactions

Year:

2017

Language:

english

File:

PDF, 269 KB

english, 2017

2

Cleaving the βO4 Bonds of Lignin Model Compounds in an Acidic Ionic Liquid, 1-H-3-Methylimidazolium Chloride: An Optional Strategy for the Degradation of Lignin

Songyan Jia, Blair J. Cox, Prof. Xinwen Guo, Dr. Z. Conrad Zhang, Dr. John G. Ekerdt

Journal:

Year:

2010

Language:

english

File:

PDF, 283 KB

english, 2010

3

Chemically capping copper with cobalt

Lucas B. Henderson, John G. Ekerdt

Journal:

Microelectronic Engineering

Year:

2010

Language:

english

File:

PDF, 453 KB

english, 2010

4

Catalytic degradation of lignin model compounds in acidic imidazolium based ionic liquids: Hammett acidity and anion effects

Blair J. Cox, Songyan Jia, Z. Conrad Zhang, John G. Ekerdt

Journal:

Polymer Degradation and Stability

Year:

2011

Language:

english

File:

PDF, 581 KB

english, 2011

5

The role of lattice anion vacancies in the activation of CO and as the catalytic site for methanol synthesis over zirconium dioxide and yttria-doped zirconium dioxide

Ronald G. Silver, Cheinchang J. Hou, John G. Ekerdt

Journal:

Journal of Catalysis

Year:

1989

Language:

english

File:

PDF, 1.57 MB

english, 1989

6

Isotope studies of the effect of acid sites on the reactions of C3 intermediates during isosynthesis over zirconium dioxide and modified zirconium dioxide

Nancy B. Jackson, John G. Ekerdt

Journal:

Journal of Catalysis

Year:

1990

Language:

english

File:

PDF, 708 KB

english, 1990

7

Chemical vapor deposition of ruthenium–phosphorus alloy thin films: Using phosphine as the phosphorus source

Bost, Daniel E., Ekerdt, John G.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 497 KB

english, 2014

8

Highly Controllable and Stable Quantized Conductance and Resistive Switching Mechanism in Single-Crystal TiO 2 Resistive Memory on Silicon

Hu, Chengqing, McDaniel, Martin D., Posadas, Agham, Demkov, Alexander A., Ekerdt, John G., Yu, Edward T.

Journal:

Year:

2014

Language:

english

File:

PDF, 1.67 MB

english, 2014

9

Effect of CO on Ru Nucleation and Ultra-Smooth Thin Film Growth by Chemical Vapor Deposition at Low Temperature

Liao, Wen, Ekerdt, John G.

Journal:

Chemistry of Materials

Year:

2013

Language:

english

File:

PDF, 1.37 MB

english, 2013

10

Subnanoscale Lanthanum Distribution in Lanthanum-Incorporated Hafnium Oxide Thin Films Grown Using Atomic Layer Deposition

Wang, Tuo, Ekerdt, John G.

Journal:

Chemistry of Materials

Year:

2010

Language:

english

File:

PDF, 3.76 MB

english, 2010

11

XPS Investigation of the Atomic Layer Deposition Half Reactions of Bis(N- tert -butyl-N′-ethylpropionamidinato) Cobalt(II)

Elko-Hansen, Tyler D.-M., Ekerdt, John G.

Journal:

Chemistry of Materials

Year:

2014

Language:

english

File:

PDF, 2.47 MB

english, 2014

12

Epitaxial c-axis oriented BaTiO3 thin films on SrTiO3-buffered Si(001) by atomic layer deposition

Ngo, Thong Q., Posadas, Agham B., McDaniel, Martin D., Hu, Chengqing, Bruley, John, Yu, Edward T., Demkov, Alexander A., Ekerdt, John G.

Journal:

Applied Physics Letters

Year:

2014

Language:

english

File:

PDF, 965 KB

english, 2014

13

Characterization and modeling of volumetric and mechanical properties for step and flash imprint lithography photopolymers

Colburn, Matthew, Suez, Itai, Choi, Byung Jin, Meissl, Mario, Bailey, Todd, Sreenivasan, S. V., Ekerdt, John G., Willson, C. Grant

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Year:

2001

Language:

english

File:

PDF, 199 KB

english, 2001

14

A Model for Heterogeneous Nucleation and Growth of Silicon Nanoparticles on Silicon Dioxide from Disilane

Leach, William T., Zhu, Jian-Hong, Ekerdt, John G., Mashiro, Supika, Sakai, Junro, Kawshima, Takayuki

Journal:

MRS Proceedings

Year:

2001

Language:

english

File:

PDF, 74 KB

english, 2001

15

Selective Growth of Titanium Nitride on HfO 2 across Nanolines and Nanopillars

Chopra, Sonali N., Zhang, Zizhuo, Kaihlanen, Chris, Ekerdt, John G.

Journal:

Chemistry of Materials

Year:

2016

Language:

english

File:

PDF, 5.03 MB

english, 2016

16

First-principles predictions of ruthenium-phosphorus and ruthenium-boron glassy structures and chemical vapor deposition of thin amorphous ruthenium-boron alloy films

Bost, Daniel E., Kim, Hyun-Woo, Chou, Chia-Yun, Hwang, Gyeong S., Ekerdt, John G.

Journal:

Thin Solid Films

Year:

2017

Language:

english

File:

PDF, 1.46 MB

english, 2017

17

Miniature Passive Wireless Resonant Platform for Chemical Memory-Based Threshold Sensing

Pasupathy, Praveen, Trivedi, Tanuj, Leonhardt, Brad, Zhang, Sheng, Ekerdt, John G., Neikirk, Dean P.

Journal:

IEEE Sensors Journal

Year:

2017

Language:

english

File:

PDF, 1.23 MB

english, 2017

18

Oxygen Vacancies at the γ-Al2O3/STO Heterointerface Grown by Atomic Layer Deposition

Ngo, Thong Q., McDaniel, Martin D., Posadas, Agham, Demkov, Alexander A., Ekerdt, John G.

Journal:

MRS Proceedings

Year:

2015

Language:

english

File:

PDF, 215.36 MB

english, 2015

19

Epitaxial growth of high- k Ba x Sr 1â x TiO 3 thin films on SrTiO 3 (001) substrates by atomic layer deposition

Le, Thanh Tung, Ekerdt, John G.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2020

File:

PDF, 3.50 MB

2020

20

Composition and annealing effects on the linear electroâoptic response of solutionâdeposited barium strontium titanate

Edmondson, Bryce I., Kwon, Sunah, Ortmann, J. Elliott, Demkov, Alexander A., Kim, Moon J., Ekerdt, John.G.

Journal:

Journal of the American Ceramic Society

Year:

2020

File:

PDF, 21.48 MB

2020

21

Vacuum Ultraviolet Enhanced Oxidationâ A Route to the Atomic Layer Etching of Palladium Metal

Coffey, Brennan M, Nallan, Himamshu C, Engstrom, James R, Lam, Chon Hei, Ekerdt, John G

Journal:

Chemistry of Materials

Year:

2020

File:

PDF, 5.02 MB

2020

22

Diffusion of cyclic hydrocarbons in benzene-swollen, divinylbenzene-crosslinked polystyrene beads

John B. Roucis, John G. Ekerdt

Journal:

Journal of Applied Polymer Science

Year:

1982

Language:

english

File:

PDF, 470 KB

english, 1982

23

Electron induced adsorption, desorption and decomposition of ammonia on GaAs(100)

Y.-M. Sun, D.W. Sloan, T. Huett, J.M. White, John G. Ekerdt

Journal:

Surface Science Letters

Year:

1993

Language:

english

File:

PDF, 399 KB

english, 1993

24

A temperature-programmed desorption/X-ray photoelectron spectroscopy study of ditertiarybutylarsine on GaAs(100)

Michael S. Jackson, John M. Heitzinger, John W. Nail, Robert D. Culp, John G. Ekerdt

Journal:

Applied Surface Science

Year:

1994

Language:

english

File:

PDF, 586 KB

english, 1994

25

Infrared study of polystyrene-bound rhodium under hydroformylation conditions

Stanley C. Park, John G. Ekerdt

Journal:

Journal of Molecular Catalysis

Year:

1984

Language:

english

File:

PDF, 959 KB

english, 1984

26

Interactions of germanium atoms with silica surfaces

Scott K. Stanley, Shawn S. Coffee, John G. Ekerdt

Journal:

Applied Surface Science

Year:

2005

Language:

english

File:

PDF, 180 KB

english, 2005

27

Selective silicon nanoparticle growth on high-density arrays of silicon nitride

Shawn S. Coffee, Davood Shahrjerdi, Sanjay K. Banerjee, John G. Ekerdt

Journal:

Journal of Crystal Growth

Year:

2007

Language:

english

File:

PDF, 902 KB

english, 2007

28

The role of oxidized germanium in the growth of germanium nanoparticles on hafnia

Wyatt A. Winkenwerder, John G. Ekerdt

Journal:

Journal of Crystal Growth

Year:

2008

Language:

english

File:

PDF, 185 KB

english, 2008

29

VLS growth of Si nanocones using Ga and Al catalysts

Joonho Bae, Niraj N. Kulkarni, Ji Ping Zhou, John G. Ekerdt, Chih-Kang Shih

Journal:

Journal of Crystal Growth

Year:

2008

Language:

english

File:

PDF, 830 KB

english, 2008

30

Pattern formation of nanoflowers during the vapor–liquid–solid growth of silicon nanowires

Joonho Bae, Rebecca Thompson-Flagg, John G. Ekerdt, Chih-Kang Shih

Journal:

Physica B: Condensed Matter

Year:

2008

Language:

english

File:

PDF, 822 KB

english, 2008

31

Chemical routes to ultra thin films for copper barriers and liners

Jinhong Shin, Hyun-Woo Kim, Gyeong S. Hwang, John G. Ekerdt

Journal:

Surface and Coatings Technology

Year:

2007

Language:

english

File:

PDF, 433 KB

english, 2007

32

Interaction of germanium with silicon dioxide

Wyatt A. Winkenwerder, John G. Ekerdt

Journal:

Surface Science

Year:

2008

Language:

english

File:

PDF, 379 KB

english, 2008

33

Germanium interactions with Si-etched silicon dioxide

Wyatt A. Winkenwerder, John G. Ekerdt

Journal:

Surface Science

Year:

2008

Language:

english

File:

PDF, 576 KB

english, 2008

34

Temperature programmed desorption studies of deuterium passivated silicon nanocrystals

Navneethakrishnan Salivati, John G. Ekerdt

Journal:

Surface Science

Year:

2009

Language:

english

File:

PDF, 516 KB

english, 2009

35

Effect of subsurface boron on photoluminescence from silicon nanocrystals

Navneethakrishnan Salivati, Nimrod Shuall, Joseph M. McCrate, John G. Ekerdt

Journal:

Surface Science

Year:

2011

Language:

english

File:

PDF, 440 KB

english, 2011

36

Chemical vapor deposition of amorphous ruthenium–phosphorus alloy films

Jinhong Shin, Abdul Waheed, Wyatt A. Winkenwerder, Hyun-Woo Kim, Kyriacos Agapiou, Richard A. Jones, Gyeong S. Hwang, John G. Ekerdt

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 1.54 MB

english, 2007

37

Time-to-failure analysis of 5 nm amorphous Ru(P) as a copper diffusion barrier

Lucas B. Henderson, John G. Ekerdt

Journal:

Thin Solid Films

Year:

2009

Language:

english

File:

PDF, 385 KB

english, 2009

38

Hot-wire chemical vapor deposition of silicon nanoparticles on fused silica

Navneethakrishnan Salivati, Yong Q. An, Michael C. Downer, John G. Ekerdt

Journal:

Thin Solid Films

Year:

2009

Language:

english

File:

PDF, 312 KB

english, 2009

39

Cracking assisted nucleation in chemical vapor deposition of silicon nanoparticles on silicon dioxide

W.Thomas Leach, Jianhong Zhu, John G. Ekerdt

Journal:

Journal of Crystal Growth

Year:

2002

Language:

english

File:

PDF, 257 KB

english, 2002

40

Thermal desorption effects in chemical vapor deposition of silicon nanoparticles

W.Thomas Leach, Jian-hong Zhu, John G Ekerdt

Journal:

Journal of Crystal Growth

Year:

2002

Language:

english

File:

PDF, 580 KB

english, 2002

41

The influence of metal oxide additives on the molecular structures of surface tungsten oxide species on alumina: I. Ambient conditions

Marlene M Ostromecki, Loyd J Burcham, Israel E Wachs, Narayanan Ramani, John G Ekerdt

Journal:

Journal of Molecular Catalysis A: Chemical

Year:

1998

Language:

english

File:

PDF, 335 KB

english, 1998

42

Elaboration and quantitative investigation of BCN-type films by dynamic SIMS using the MCsx+ mode

Fang Wu, Nathalie Valle, Ryan Fitzpatrick, John G. Ekerdt, L. Houssiau, Henri-Noël Migeon

Journal:

Surface and Interface Analysis

Year:

2011

Language:

english

File:

PDF, 238 KB

english, 2011

43

Formation of {1 1 3} facetted Si hut clusters on thin Si1−xCx films on Si(0 0 1)

Jianhong Zhu, John G. Ekerdt

Journal:

Journal of Crystal Growth

Year:

2004

Language:

english

File:

PDF, 446 KB

english, 2004

44

Hot-wire CVD of Ge nanoparticles on Si-etched silicon dioxide

Joseph M. McCrate, Navneethakrishnan Salivati, John G. Ekerdt

Journal:

Journal of Crystal Growth

Year:

2011

Language:

english

File:

PDF, 851 KB

english, 2011

45

Surface reactions and kinetically-driven patterning scheme for selective deposition of Si and Ge nanoparticle arrays on HfO2

Scott K. Stanley, Sachin V. Joshi, Sanjay K. Banerjee, John G. Ekerdt

Journal:

Surface Science

Year:

2006

Language:

english

File:

PDF, 235 KB

english, 2006

46

Isomerization of 1-Butene over Silica-Supported Mo(VI), W(VI), and Cr(VI)

Narayanan C. Ramani, David L. Sullivan, John G. Ekerdt

Journal:

Journal of Catalysis

Year:

1998

Language:

english

File:

PDF, 158 KB

english, 1998

47

Effect of Catalyst Oxidation State and Structure on Thiophene Hydrodesulfurization over Model Molybdenum Catalysts

David L. Sullivan, John G. Ekerdt

Journal:

Journal of Catalysis

Year:

1997

Language:

english

File:

PDF, 159 KB

english, 1997

48

Selective Oxidation of 1-Butene over Silica-Supported Cr(VI), Mo(VI), and W(VI) Oxides

Narayanan C. Ramani, David L. Sullivan, John G. Ekerdt, Jih-Mirn Jehng, Israel E. Wachs

Journal:

Journal of Catalysis

Year:

1998

Language:

english

File:

PDF, 297 KB

english, 1998

49

Mechanisms of Thiophene Hydrodesulfurization on Model Molybdenum Catalysts

David L. Sullivan, John G. Ekerdt

Journal:

Journal of Catalysis

Year:

1998

Language:

english

File:

PDF, 226 KB

english, 1998

50

Hydrodesulfurization Studies with a Single-Layer Molybdenum Disulfide Catalyst

William P. Boone, John G. Ekerdt

Journal:

Journal of Catalysis

Year:

2000

Language:

english

File:

PDF, 107 KB

english, 2000